Helmholtz Zentrum Berlin
Author in the following contributions
- Blazed Soft X-Ray Gratings Fabricated by Grey-Tone Electron-Beam Lithography and Thermal Oxidation of Silicon
- Highly efficient multilayer-coated blazed and laminar gratings for tender X-ray energy range
- Closing the gap - towards tender X-rays by means of multi-layer coated gratings as monochromator optics
- At-Wavelength Metrology facility for EUV, XUV and tender X-ray energy range optics
- How not to become a ghost writer
