PhotonMEADOW23

Details for Jens Viefhaus

Title: Dr

Affiliation: Helmholtz-Zentrum Berlin

Author in the following contributions

• Highly efficient multilayer-coated blazed and laminar gratings for tender X-ray energy range
• Efficient simulation and AI surrogate models for real-time optimisation
• At-Wavelength Metrology facility for EUV, XUV and tender X-ray energy range optics